The Best Industrial Heating & Monitoring Solutions for Semiconductor Processing

Precise temperature control and the reduction of uneven temperature distributions support yield maximization efforts from deposition and oxidation to etching and photoresist baking, resulting in more consistent wafers and less waste, both of which save money.

Reducing energy consumption is a second priority throughout fabrication. The modern fab plant uses massive amounts of electricity, so even small savings across large numbers of equipment and operations can make a significant difference.

Achieving both goals requires reliable, high-quality heaters and accurate temperature controllers. Here are some of the few we recommend:

Watlow’s Advanced ULTRAMIC® Ceramic Heater

This high-performance ceramic heater is constructed from aluminum nitride (AIN) to ensure zero contamination in critical applications that need clean heaters. It can also operate up to 1,112°F (600°C), features an ultra-fast ramp-up rate of 270°F (150°C) per second, and is impervious to moisture.

The ULTRAMIC® ceramic heater is ideal for eutectic die bonding applications because it heats up and cools down quickly, features vacuum holes and grooves, and has exceptional surface flatness (0.05 mm) and surface finish (<1.5 μm).

Watlow’s FIREROD® Cartridge Heater

Used in processes such as wire and die bonding and semiconductor chamber heating, cartridge heaters are an efficient method of heating solid materials. Watlow’s FIREROD® cartridge heaters are made using a swaging process that minimizes part diameter, making them ideal for use in congested spaces.

Available in a wide range of diameters and in lengths up to 72” (with longer available on request), FIREROD® cartridge heaters will operate at temperatures up to 1,400°F. Power densities are up to 400W/in2. Sheaths are produced from Alloy 800, a nickel-iron-chromium alloy with high-temperature strength and excellent corrosion resistance.

Watlow’s FIREBAR® Tubular Heater

When used on chemical vapor deposition or physical vapor deposition equipment, tubular heaters offer many advantages over the traditional circular cross-section heating elements. When immersed with the element in a vertical orientation, fluid flow increases heat transfer, resulting in faster heating but with a lower watt density to reduce scaling and coking and extend element life. They can also be formed into various shapes to fit existing grooves or restricted areas in semiconductor equipment.

FIREBAR® heaters can be designed with Incoloy® or 304 stainless sheaths, enabling operating temperatures of 1,200°F or higher while providing excellent corrosion resistance. The maximum watt density is 60W/in2.

Watlow’s True Surface Thermocouple

The True Surface Thermocouples manufactured by Watlow are designed for non-invasive flat-surface temperature measurements. They’re small, highly accurate (1-2% ΔT), and feature a removable molded cover. These thermocouples are commonly used in semiconductor chambers and other cleanroom equipment where embedded sensors aren’t feasible.

Watlow’s Mineral-Insulated Thermocouple

This thermocouple is engineered with Watlow’s proprietary XACTPAK® mineral-insulated material, which enables fast, accurate temperature measurements up to 2,200°F (1,200°C). Its outer sheath offers exceptional corrosion protection, and its special mineral insulation provides additional protection from moisture and thermal shock. It can be customized with various lead lengths, lead wires, and terminations.

Eurotherm’s EPack™ SCR Power Controller

Events that disturb the electrical supply, such as voltage sags, can be extremely costly in operations like photolithography, etching, and doping. Avoiding such disturbances requires high-quality power controllers, such as the Silicon Controlled Rectifier (SCR) family from Eurotherm by Watlow.

Designed to control electrical loads for resistive and infrared applications, Eurotherm’s EPack™ SCR power controllers optimize energy usage, provide stability, and offer accurate, repeatable multi-zone temperature control and heat-cycle optimization, helping reduce processing time.

The EPack™ controllers are available for one-, two, and three-phase applications, feature a maximum current and voltage of 125A and 500V, and are compatible with many digital communication options.

Tempco Cast-In Heaters

Tempco’s cast-in heaters provide the uniform heat distribution needed for semiconductor fabrication processes, including wafer processing, wave soldering, and reflow surface-mount processes. Unlike other methods, in which the heating element is added to the equipment, a cast-in heater features electrical elements embedded in metal (usually aluminum, brass, or bronze) with good thermal conductivity. The maximum temperature depends on the alloy used.

These heaters are available in pedestal and platen forms and are fully customized to meet application requirements and equipment specifications. Tempco uses in-house CNC equipment to precisely machine working surfaces to customer requirements, with tolerances as close as 0.0005 in.

BriskHeat Heating Jackets

Intended for both heating and insulating, BriskHeat’s jackets wrap around pipes, valves, and other elements to maintain uniform temperatures across a component or throughout an entire line. These jackets meet SEMI S2 standards for Class 10 and Class 100 cleanrooms, and are designed for easy on/off installation.

Their maximum operating temperatures are 1,100°F for Class 100 applications and 482°F for Class 10. Benefits include reduced condensation build-up, decreased maintenance, and energy savings.

Vaisala Indigo300

Indigo300 is part of a family of probes and data transmitters engineered by Vaisala. They’re designed to improve process measurements, including temperature and CO2 levels. The Indigo300 sits in the middle of the transmitter range, between 500 and 200. In semiconductor applications, it provides precise measurements of humidity, dew point, temperature, pressure, and concentrations of wet chemistries, helping increase yield, shorten processes, and ensure high-quality chips.

The Indigo300 features an IP66-rated, corrosion-resistant metal housing intended for harsh conditions. There are multiple installation options, and the system can transmit a wide variety of signals in the most challenging applications.

Get More Product Recommendations

Hi-Watt helps manufacturers and researchers from all sectors, including semiconductor manufacturing, find the best industrial heating and monitoring solutions. We’ve partnered with some of the most trusted brands on the market, including Watlow, Eurotherm, Tempco, BriskHeat, and Vaisala, to ensure quality, accuracy, and reliability.

Most of our available solutions can be configured based on your application requirements. We can also provide installation and configuration assistance, as well as ongoing field repairs and ISO 17025-compliant calibrations.

Visit our website to learn more about our solutions, or contact us today to speak with a Hi-Watt application specialist.